UltraSurf 4X 300 Specifications

Non-Contact Metrology Specs
UltraSurf 4X 300

Travels

X-Axis Travel
300mm
Z-Axis Travel
200mm
B-Axis Travel
360°
C-Axis Travel
360°

Resolution

Linear
5.0nm
Rotary
0.072 sec.

Max. Velocity

Linear
20 mm/s
Rotary
40 RPM

*Specifications subject to change. Contact OptiPro for the latest specifications.

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