OptiTrace 5000 Specifications

Surfcom 5000 Technical Specifications*

High precision aspheric contour measurement and surface roughness analysis

  • Large measuring range - up to 32 mm vertical, 200 mm x-axis
  • User-friendly and simplified software interface for automated measurement and analysis
  • Comprehensive, aspheric analysis software with custom form and filter data entry
  • Aspheric toolbox for form analysis with slope error, optimized base radius, and sag table tools

Horizontal axis (X-Axis)

Traversing length; Measuring range
200 mm
Straightness accuracy
0.05 + 3L/µm
0.54 nm
Indicated X accuracy
+/- (0.2 µm+L/1000 mm)
Tracing speed
Variable from 0.03 mm/s to 60 mm/s
Detection principle

Column axis (C-Axis)

Traversing height
500 mm
Drive speed
Variable to 200 mm/s
Detection principle


Detection principle
Dual beam laser interferometer
0.31 nm
Measuring range
13 mm, 26 mm, and 32 mm
Indicated Z accuracy
+ (0.2 + I H I /1000) µm
Measuring force
0.75 mN
Radius of stylus
2 µm diamond, 0.5 mm, 1.0 ruby
Material of stylus
Diamond (option: ruby ball)
Tracing arm lift off
Automatic system


Power supply
110, 120 Vac (50-60 Hz)
Power consumption
Approx. 350 VA
2100 mm width, 1500 mm height, 1000 mm depth
Dimensions of base
600 mm width, 320 mm depth
Approx. 350 kg
Standard accessories
Calibration device, gauge block, tools, diamond & ruby tip styli


Accuracy guaranteed
20 ± 2°C (without direct air movement)

0.5°C / 1 hour (maximum rate of change)

0.1°C / operation time
40-80% (without moisture)

*Specifications subject to change. For the latest specifications of the Surfcom 5000, please contact Carl Zeiss IMT Corporation or go to www.zeiss.com/imt.

Y-Theta Table Technical Specifications (Optional)

Theta (Rotary Axis)
6" diameter air bearing
Box way linear air bearing, hard-coated aluminum, 200 mm travel
Material: 400C hardened stainless steel
Straightness: 0.125/25 mm
Radial/Axial accuracy: 0.125 µm
Air consumption: 1.0 scfm @ 60 psi
Angular wobble: 0.025 µm/25 mm
Direct drive DC servo motor package, brushless linear motor
Axial load capacity: 35 lbs.
Scale resolution of 50 nm and a graduation accuracy of 1.5 µm
Air consumption: 1.0 scfm @ 60 psi
Laser calibration of linear axis < 1.0 µm & straightness of < 1.5 µm/200mm
Tilt and center fine adjustment table, 4 knobs each

Direct drive DC servo motor package

Graduation accuracy: ± 2.75 arc sec

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