UltraSurf 5X Specifications

Non-Contact Metrology Specs*
UltraSurf 5X

Travels

X-Axis Travel
400mm
Y-Axis Travel
200mm
Z-Axis Travel
200mm
B-Axis Travel
+/- 120°
C-Axis Travel
360° Continuous

Resolution

Linear
5.0nm
Rotary
0.05 sec.

Maximum Velocity

Linear
20 mm/s
Rotary
66 RPM
Max Scanning Speed
1,000 Hz (with appropriate probe configuration)

*Specifications subject to change. Contact OptiPro for the latest specifications.

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