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UltraSurf 5X 100 and 200 Specifications

Model: UltraSurf 5X 100 UltraSurf 5X 200 UltraSurf 5X 100 and 200 UltraSurf 5X 100 and 200

Axis:
X, Y, Z

X, Y, Z

B

C

Travel:
100 mm

200 mm

360°

360°

Resolution:
5 nm

5 nm

0.274 sec
0.274 sec

Max. Velocity: 30 mm/s
30 mm/s
6 RPM 6 RPM