OptiTrace 5000 Specifications
Surfcom 5000 Technical Specifications*
High precision aspheric contour measurement and surface roughness analysis
- Large measuring range - up to 32 mm vertical, 200 mm x-axis
- User-friendly and simplified software interface for automated measurement and analysis
- Comprehensive, aspheric analysis software with custom form and filter data entry
- Aspheric toolbox for form analysis with slope error, optimized base radius, and sag table tools
| Horizontal axis (X-Axis) |
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| Traversing length; Measuring range |
200 mm |
| Straightness accuracy |
0.05 + 3L/µm |
| Resolution |
0.54 nm |
| Indicated X accuracy |
+/- (0.2 µm+L/1000 mm) |
| Tracing speed |
Variable from 0.03 mm/s to 60 mm/s |
| Detection principle |
Scale |
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| Column axis (C-Axis) |
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| Traversing height |
500 mm |
| Drive speed |
Variable to 200 mm/s |
| Detection principle |
Scale |
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| Detector |
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| Detection principle |
Dual beam laser interferometer |
| Resolution |
0.31 nm |
| Measuring range |
13 mm, 26 mm, and 32 mm |
| Indicated Z accuracy |
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| Measuring force |
0.75 mN |
| Radius of stylus |
2 µm diamond, 0.5 mm, 1.0 ruby |
| Material of stylus |
Diamond (option: ruby ball) |
| Tracing arm lift off |
Automatic system |
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| Miscellaneous |
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| Power supply |
100, 110, 120, 200, 220, 240 Vac (50-60 Hz) |
| Power consumption |
Approx. 350 VA |
| Dimensions |
2100 mm width, 1500 mm height, 1000 mm depth |
| Dimensions of base |
600 mm width, 320 mm depth |
| Weight |
Approx. 350 kg |
| Standard accessories |
Calibration device, gauge block, tools, diamond & ruby tip styli |
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| Environment |
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| Temperature |
10-30°C |
| Accuracy guaranteed |
20 ± 2°C (without direct air movement) |
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0.5°C / 1 hour (maximum rate of change) |
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0.1°C / operation time |
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| Humidity |
40-80% (without moisture) |
*Specifications subject to change. For the latest specifications of the Surfcom 5000, please contact Carl Zeiss IMT Corporation or go to www.zeiss.com/imt.
Y-Theta Table Technical Specifications (Optional)
| Theta (Rotary Axis) |
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Y-Axis |
| 6" diameter air bearing |
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Box way linear air bearing, hard-coated aluminum, 200 mm travel |
| Material: 400C hardened stainless steel |
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Straightness: 0.125/25 mm |
| Radial/Axial accuracy: 0.125 µm |
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Air consumption: 1.0 scfm @ 60 psi |
| Angular wobble: 0.025 µm/25 mm |
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Direct drive DC servo motor package, brushless linear motor |
| Axial load capacity: 35 lbs. |
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Scale resolution of 50 nm and a graduation accuracy of 1.5 µm |
| Air consumption: 1.0 scfm @ 60 psi |
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Laser calibration of linear axis < 1.0 µm & straightness of < 1.5 µm/200 mm |
| Tilt and center fine adjustment table, 4 knobs each |
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| Direct drive DC servo motor package |
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| Graduation accuracy: ± 2.75 arc sec |
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